• High accuracy, compact design
• With easy operation
• Little affected by changes in humidity/atmospheric pressure and air flow
• Non-contact head achieving high repeatability and extremely small return error Applications
• Applications
  Electron microscopes, wafer checkers, etc.

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• Comparable to the laser interferometer in accuracy and resolution.
• Has a built-in high accuracy optical zero point.
• Various measuring lengths ranging from 30 to 410mm 9 models.
• Easy to install and adjust like Magnescaler
• Little affected by disturbed air and changing temperature and atmospheric pressure
• Various interface modes
• Applications
  semiconductor manufacture, inspection, precision machining and testing.