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Measurement/Evaluation:
PC system with windows operating system and MarSurf
XR 20 software applications in German, English, French,
Italian and Spanish language.
Parameters
and Profiles:
More than 65 parameters for R, P and W profiles and
MOTIF; including tolerance monitoring and statistics.
- Parameter lists and characteristic diagrams
Profile
Resolution:
Up to 76 nm at ± 25 µm, depending on type of applied
probe
Measuring
Range:
± 25 µm up to ± 250 µm, depending on type of applied
probe
Sampling
Lengths N:
1 up to 5 or 1 up to Nmax in N x Lc mode. Nmax = maximum
tracing lengths of drive unit / selected Lc
Filter
Types:
GS / 2RC / SF ISO 13565-1 / Profile Inversion NEG
/ ARC- (Elimination of Arc).- Further special filters
as extra option
Cutoff
Lc:
Free Lc selection possible, maximum 25 mm Lc = f(lt);
0,025 mm / 0,08 mm / 0,25 mm / 0,8 mm / 2,5 mm / 8
mm as well as Lc short and default value according
to ISO 4288; limits depend on Lt and dx.
Ls filter free selection from 1,5 up to 100 µm or
select from: 2,5 µm / 8 µm / 25 µm
Drive
Units:
PZK, GD 25, PGK 20, PGK 120, PRK (via PAV 62)
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